METHOD FOR TESTING SEMICONDUCTOR DEVICE

摘要

PURPOSE: A method for testing semiconductor device is provided to shorten a total testing time by performing other operations during idle time of the testing time. CONSTITUTION: In a method for testing semiconductor device performing other operation except test operation during test process in probe testing to a semiconductor wafer, the other operation is performed during idle period of the system due to the movement of the probe. According to the method, the time required to the test is very much saved in the fact that many operations directly no related to the test are performed during the idle period.