发明名称 POWER CONTROL APPARATUS OF ION IMPLANTATION EQUIPMENT
摘要 PURPOSE: A power control apparatus of an implantation equipment is provided to prevent an unnecessary power consumption by controlling a power supply according to closing and opening of a door. CONSTITUTION: An implantation equipment has a light, a power supply apparatus and a door. A switch is switched according to a closing and an opening of the door. A power of the light is controlled by an on and off operation of the switch. A power circuit controls an operation of a chamber. The power circuit comprises a first and a second switching part(24,34), a triac(36) and a detecting part(32). The first switching part(24) is switched according to the closing and opening of the door. The detecting part(32) checks whether the door is opened by a switching signal of the first switching part. The second switching part(34) is switched when a signal from the detecting part is over a predetermined level, and the triac(36) controls the power supply according to a switching state of the second switching part.
申请公布号 KR20000019534(A) 申请公布日期 2000.04.15
申请号 KR19980037680 申请日期 1998.09.12
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 OH, YONG SEOP
分类号 H01L21/265;(IPC1-7):H01L21/265 主分类号 H01L21/265
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