THIN FILM ACTUATED MIRROR ARRAY AND MANUFACTURING METHOD OF THE SAME

摘要

PURPOSE: A thin film type light path controller and a method for manufacturing the same are provided to improve a horizontal degree of a cantilever actuator by reducing a layer difference generated in forming an active matrix. CONSTITUTION: An active matrix(100) comprises a device separation film to separate the active matrix(100) into an active region and a field region and MOS transistors having a gate(115), a source(110) and a drain(105). The active matrix also involves the first metal layer having a gate line(151) laminated on MOS transistors and connected to the gate(115), a source line(152) connected to the source(110) and a drain pad(153) connected to the drain(105).