THIN FILM ACTUATED MIRROR ARRAY AND MANUFACTURING METHOD OF THE SAME

摘要

PURPOSE: A thin film type apparatus for controlling a light path and a method for manufacturing are provided to prevent an actuator from malfunctioning before an image signal is approved by blocking a luminous flux incident from a light source to reach a substrate. CONSTITUTION: A transistor(15) having a source electrode(15a), a gate electrode(15b) and a drain electrode(15c) is formed on a substrate(10). The first metal layer(55) is formed on the exposed drain electrode(15c) and an incidence layer(25). The first protective layer(60) is formed on the first metal layer(55) to prevent the first metal layer(55) from being damaged. The first adhesive layer(65a) and the first blocking layer(65b) have the first opening unit(155) and are formed with partly removing an area of a drain pad(45). The first adhesive layer(65a) enables the first blocking layer(65b) to paste with the first protective layer firmly. The first blocking layer(65b) prevents a photocurrent from flowing to the substrate(10). The second protective layer(70) is formed on the second metal layer(65) to prevent the second metal layer(65) from being damaged. The second adhesive layer(130a) and the second blocking layer(130b) have the second opening unit(160) and are formed with partly removing an area of the first opening unit(155). The second adhesive layer(130a) enables the second blocking layer(130b) to paste with the second protective layer(70) firmly. The second blocking layer(130b) prevents a photocurrent from flowing to the substrate(10). The third protective layer(135) is formed on the third metal layer(130) to prevent the third metal layer(130) from being damaged. An etching preventing layer(75) is formed on the third protective layer(135) to prevent the substrate(10) and the third protective layer(135) from being etched. An actuator is formed on the etching preventing layer(75).