发明名称 REACTING FURNACE FOR GENERATING MOISTURE
摘要 <p>PURPOSE: A moisture generation reacting furnace is provided to stabilize moisture generation reacting ratio of 99 percents more than. CONSTITUTION: A reacting furnace includes a chamber main body(1) having a first furnace body member(2) and a second furnace body member(3) of cylindrical shape. The inner space(1a) of the main body(1) is divided by a first spacing portion(1b) and a second spacing portion(1c) by using a diffusion filter(10). A platinum coating film(13) is formed on the first spacing portion(1b). An inlet reflection member(9) includes a case body(9a) formed in the first furnace body member(2), a through hole(9c), and a reflection plate(9b). An outlet reflection and diffusion member(11) comprises a case body(11a) formed in the second furnace body member(3), a through hole(11e), a reflection plate(11b), a diffusion filter(11c), and a platinum coating film(11d).</p>
申请公布号 KR20000020907(A) 申请公布日期 2000.04.15
申请号 KR19980039721 申请日期 1998.09.24
申请人 FUJIKIN INC.;OHMI TADAHIRO 发明人 OHMI TADAHIRO;KAWADA KOOJI;TANABE YOSHIKAJU;IKIDA NOBUKAJU;MORIMOTO AKIHIRO;MINAMI YUKIO
分类号 H01L21/02;B01J12/00;B01J23/42;B01J23/89;C01B5/00;H01L21/31;(IPC1-7):H01L21/02 主分类号 H01L21/02
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