发明名称 TWEEZER INCLUDING VACUUM STATE DISPLAYER
摘要 PURPOSE: With a tweezer, a user can check the vacuum state absorbing a wafer with the naked eye, and the unnecessary damage of the wafer is prevented by the usage of the tweezer including a vacuum state displayer. CONSTITUTION: A tweezer can handle by absorbing a wafer in vacuum and displays the vacuum state of absorbing the wafer. A vacuum state displayer comprises: a transparent window(162) formed in a handle(130); a floating material(170) moving up and down along an inner tube(140) of the handle with the transparent window on the center center; a different colored surface(176); a top/bottom guide(142,144) restricting the range of movement of the floating material actually; and a spring(164) pushing up the floating material in the absence of vacuum pressure.
申请公布号 KR20000020355(A) 申请公布日期 2000.04.15
申请号 KR19980038950 申请日期 1998.09.21
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KWUN, TAE CHUL;HANM JONG SUCK
分类号 H01L21/02;(IPC1-7):H01L21/02 主分类号 H01L21/02
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