发明名称 |
TWEEZER INCLUDING VACUUM STATE DISPLAYER |
摘要 |
PURPOSE: With a tweezer, a user can check the vacuum state absorbing a wafer with the naked eye, and the unnecessary damage of the wafer is prevented by the usage of the tweezer including a vacuum state displayer. CONSTITUTION: A tweezer can handle by absorbing a wafer in vacuum and displays the vacuum state of absorbing the wafer. A vacuum state displayer comprises: a transparent window(162) formed in a handle(130); a floating material(170) moving up and down along an inner tube(140) of the handle with the transparent window on the center center; a different colored surface(176); a top/bottom guide(142,144) restricting the range of movement of the floating material actually; and a spring(164) pushing up the floating material in the absence of vacuum pressure.
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申请公布号 |
KR20000020355(A) |
申请公布日期 |
2000.04.15 |
申请号 |
KR19980038950 |
申请日期 |
1998.09.21 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
KWUN, TAE CHUL;HANM JONG SUCK |
分类号 |
H01L21/02;(IPC1-7):H01L21/02 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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