发明名称 GAS BAR FRAME FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 PURPOSE: A gas bar frame for manufacturing semiconductor device is provided to prevent accidents due to the mistake of an operator by classifying the gas used in manufacturing the semiconductor device through a color display part attached to the gas frame. CONSTITUTION: A gas bar frame(20) for manufacturing semiconductor device comprises color display part(24) attached on the surface. The color display part is stripe shape and display the feature of the gas within the frame. The display part displays yellow color if the gas is inflammable, displays red color if toxic, or displays blue color if corrosive. Therefore, the gas used in manufacturing the semiconductor device is identified according to the color of the color display part.
申请公布号 KR20000020766(A) 申请公布日期 2000.04.15
申请号 KR19980039514 申请日期 1998.09.23
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KIM, EUN HYUNG;KIM, SU HYUN
分类号 H01L21/48;(IPC1-7):H01L21/48 主分类号 H01L21/48
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