MONITORING SYSTEM OF SEMICONDUCTOR PROCESS EQUIPMENT

摘要

PURPOSE: A system for monitoring semiconductor process facilities is provided to simplify wiring for the monitoring between a central monitoring device and many semiconductor process facilities. CONSTITUTION: A main selection signal line(L1) containing the first extension 'w' and the second extension 'x' and a main information transmission line(L2) containing the third extension 'y' and the fourth extension 'z' are connected to a central monitoring device(20). The main selection signal line(L1) and the main information transmission line(L2) are installed near to semiconductor process facilities(22-28). Each semiconductor process facilities(22-28) is connected to a sub selection signal line(L3) having a pair of extensions 'ws' and 'xs' and a sub information transmission line(L4) having a pair of extensions 'ys' and 'zs'.