MONITORING SYSTEM OF CLEAN ROOM

摘要

PURPOSE: A monitoring system is made so that a scale of system hardware is increased only in quantity but a cable for installing a number of sensors is not increased when applying a number of sensors in the system by minimizing wire. CONSTITUTION: A monitoring system is applied using the fact that sensing signals of all kinds of sensors(S01-S0n,S11-S1n) can be supplied to a main controller(3) through a data buffer(4a,4b) only by connecting the sensors watching a process state of a facility with wire. The system can use the space of the facility effectively by removing wire connecting the sensors with the data buffer, by adding a function receiving a wireless data to the data buffer and transmitting the sensing signals of the sensors wirelessly by connecting a wireless data transmission unit(5,6) to the sensors which transmits the sensing signals of the sensors wirelessly after converting into wireless signals.