DEVICE FOR SUPPLYING CHEMICALS OF SPINNER TO MANUFACTURE SEMICONDUCTOR

摘要

PURPOSE: In device for supplying chemicals of spinner to manufacture semiconductor, an exhausting gauge for chemical vapor is possessed to prevent a pollution of PLC(Programable Logic Controller) within cabinet due to leak. CONSTITUTION: A container and a spinner are connected with a supplying line. The supplying line equip with a first measuring device such as nanometer to measure the passing chemicals. Also the container and an exhausting device such as a pump are connected with an exhausting line. The exhausting line equip with a second measuring device such as nanometer to measure the passing chemicals. The second measuring device checks an amount of exhausting chemical vapor in advance. So, if the amount changes due to leak, an inspection is carried out to prevent a pollution of PLC.