| 摘要 |
PURPOSE: A semiconductor transfer apparatus is provided to increase the loadable limit weight by decreasing the joint number of an articulated robot, to reduce the size of ports, and to shorten the time required to load/unload by mounting the articulated robot on a movable vehicle to be guided along guide grooves formed on the movable vehicle. CONSTITUTION: The semiconductor transfer apparatus comprises a movable vehicle(11) and an articulated robot(12). A plurality of ports(13,14) are formed on both sides of the articulated robot(12) on the movable vehicle(11). In addition, guide grooves(15) of X, Y directions are formed on the movable vehicle(11), and the articulated robot(12) is able to move along the guide grooves(15). Any cassette is seated on the ports(13,14) to be transferred from one process to another process.
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