| 摘要 |
PURPOSE: A density measuring method using X ray is provided to measure density of a thin film without breakage and to prevent an error. CONSTITUTION: A method for measuring density of a thin film comprises the steps of: transmitting an X ray to a substrate coated with a thin film while regularly changing incidence angle; measuring thickness of the thin film by measuring a period of oscillation of reflecting ray intensity of the X ray and dividing wavelength of the X ray two times the period of the oscillation; measuring mesh thickness of the thin film by detecting photon energy of the fluorescent ray diffused by the material of the thin film via a fluorescent ray detector(130); and dividing the mesh thickness by the thickness of the thin film. According to calculation of the density of the thin film through the fluorescent ray and the reflecting ray, the material of the thin film is prevented from being broken.
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