| 摘要 |
PURPOSE: A carrier box transfer apparatus is provided to prevent the abrasion of a robot arm and the release of a carrier box by forming protrusion on attachments. CONSTITUTION: A wafer carrier is transferred by a transfer rail. A robot arm supporter is mounted to vertically move to one side of a body vertically mounted on the transfer rail. First robot arms(31) are hinged to the robot arm supporter, and the width between the arms(31) is controlled in accordance with the width of a flange. Second robot arms(32) are respectively hinged to the first robot arm and are extended to a bottom of the flange. Attachments(38) are respectively contacted with guide grooves formed on a bottom of the flange, lift the wafer carrier by the second robot arms, and have protrusions(36) for being inserted into the guide grooves.
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