| 摘要 |
PURPOSE: A method for preparing a conductive polymer thin film and its apparatus are provided, to form a conductive polymer thin film of the emeraldin-salt state on a substrate directly, thereby to lower the cost and to improve the production yield. CONSTITUTION: The apparatus comprises a main valve(101), a cryostat(104), a water baffle(105), a diffusion pump(106), a molecular sieve(107), a rotary pump(108), an ion gauge(115), first and second roughing valves(116,118), and a backing valve(117) for maintaining a main chamber(101) to be vacuum; the first thermal bath(109) which is set below the main chamber and vaporizes aniline monomer and ammonium sulfate; the first molecular flow controller(111) and a thermocouple gauge(113) which control the amount of vapor of aniline monomer and ammonium sulfate generated from the first thermal bath; the second thermal bath(110) which is set in the opposite side of the first thermal bath and vaporizes HCl salt; the second molecular flow controller(112) and a pH meter(114) which are set over the second thermal bath and control the amount of HCl vapor and the pH; a substrate holder(102) which holds a substrate where a conductive polymer thin film is formed; and a vent valve which ventilates the inside of the main chamber.
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