| 摘要 |
PURPOSE: A wafer oven device is to shorten a cooling time in a chamber by winding a gas pipe around an inside chamber many times and to cool the heat generated at opening or closing of a door, thereby preventing deformation of the chamber. CONSTITUTION: A rectangular inside chamber(4) has a space therein. An outside chamber(2) is spaced from the inside chamber with the space being filled with an insulating material(11). A plate heater(16) is mounted to four sides in the inside chamber with a distance therefrom. A gas injecting port(18) and a venting port(20) are formed on a top side chamber(3a) and a bottom chamber(3b). A rectangular quartz chamber(6) forms a spatial part at an inside thereof with a distance from the plate heater by a bush. A frame supports the top side chamber and the bottom side chamber, respectively. A heater box is mounted to side surface of the outside chamber. A case(30) having a key panel part at its one side surrounds the above total structure. A joint(24) connects the inside chamber to the outside chamber to prevent deformation of appearance and maintain a constant distance.
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