| 发明名称 |
Corrosion-resistant members against a chlorine-based gas |
| 摘要 |
<p>A corrosion-resistant member against a chlorine-based gas, which member is to be exposed to a chlorine-based gas atmosphere at temperatures of not less than 600 DEG C and includes a sintered body made of aluminum nitride and a film of silicon carbide covering a surface of the sintered body and formed by chemical vapor deposition. <IMAGE></p> |
| 申请公布号 |
EP0992472(A2) |
申请公布日期 |
2000.04.12 |
| 申请号 |
EP19990307852 |
申请日期 |
1999.10.06 |
| 申请人 |
NGK INSULATORS, LTD. |
发明人 |
NISHIOKA, MASAO;KATO, NAOTAKA |
| 分类号 |
H01L21/205;C04B41/50;C04B41/87;C23C14/56;C23C16/32;C23C16/44;C23C16/458;H01L21/00;H05B3/14;(IPC1-7):C04B41/87;H05B3/28 |
主分类号 |
H01L21/205 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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