PROCESS AND DEVICE FOR DETERMINING THE LAYER THICKNESS, THE CONDUCTIVITY AND/OR THE LAYER CONTACT QUALITY OF LAYERS DEPOSITED ON SUBSTRATES,申请号EP19960900528-传众专利搜索

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发明名称	PROCESS AND DEVICE FOR DETERMINING THE LAYER THICKNESS, THE CONDUCTIVITY AND/OR THE LAYER CONTACT QUALITY OF LAYERS DEPOSITED ON SUBSTRATES
摘要
申请公布号	EP0803062(B1)	申请公布日期	2000.04.12
申请号	EP19960900528	申请日期	1996.01.11
申请人	OPTISENSE GESELLSCHAFT FUER OPTISCHE PROZESSMESSTECHNIK MBH & CO. KG I.G.	发明人	SCHULZ, HARALD, HANS;KOHNS, PETER
分类号	G01B11/06;G01N21/84;(IPC1-7):G01N25/20	主分类号	G01B11/06
代理机构		代理人
主权项
地址

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