Substrate holder

摘要

The invention relates to a holder which can be used to support and protect a substrate during the application of material by deposition techniques such as sputter deposition or evaporation. The holder is provided with a retaining ring which engages with a housing and said retaining ring defines an opening which allows the passage of deposited material onto the exposed surface of the substrate held between the housing and ring. The substrate is urged towards the ring by a biasing means which causes the surfaces of the substrate not exposed through the opening to be sealed and hence prevents the application of deposited material thereon.