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发明名称
Semiconductive device and fastening element for mechanically actuated semiconductive structures
摘要
申请公布号
EP0989395(A3)
申请公布日期
2000.04.12
申请号
EP19990117213
申请日期
1999.09.01
申请人
SIEMENS AKTIENGESELLSCHAFT
发明人
BEVER, THOMAS, DR.;EHRLER, GUENTER;SCHMITT, STEPHAN
分类号
G01L9/00;(IPC1-7):G01L9/06
主分类号
G01L9/00
代理机构
代理人
主权项
地址
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