| 摘要 |
PROBLEM TO BE SOLVED: To enhance heating efficiency of a cartridge heater by spirally, densely winding two heat resistant pipes, through which reaction gas flows on the surface of the cartridge heater, controlling the electric power supplying to the cartridge heater, and controlling the temperature of the cartridge heater. SOLUTION: Two heat resistant metal pipes 2, having connecting fixture 1 at the opposite ends, are densely wound on the surface of a rod-shaped cartridge heater 3 to use as a heat exchanging element 4. A temperature sensor 5 contained in the cartridge heater 3 is connected to a temperature controller 6 to control the temperature of the cartridge heater 3. A heat insulating material 7 is arranged in the surrounding of the heat exchanging element 4, and they are housed in a case 9 which contains a control device 8 for controlling the electric power supplied to the cartridge heater 3. The temperature controller 6 is set at a temperature determined by the kind and flow rate of reaction gas, a power source is turned on, the temperature of the cartridge heater 3 is raised, and reaction gas is fully heated inside the densely wound metal pipes 2.
|
