| 摘要 |
PROBLEM TO BE SOLVED: To accurately measure the temperature difference of air in pressurization time and the completion time of inspection, and to correct drift that is the fluctuation in pressure being generated by temperature difference by applying pressure to an object to be inspected and fitting a temperature sensor to an exhaust passage from the object to be inspected. SOLUTION: In the drift correction of leakage inspection, temperature measurement being applied to a leakage detection device is made, for example, by applying pneumatic pressure to an object 2 to be inspected from an air source 1, by providing a branch path 13 at piping 12 for the exhaust of the object 2 to be inspected, and connecting a temperature measurement part 14 where a temperature sensor 11 is fitted to the branch path 13. When the pressure is to be applied, an opening/closing valve 15 is opened for a fixed amount of time for measuring the temperature of air when the pressure is applied. On the completion of inspection, the opening/closing valve 15 is opened for measuring the temperature of the air being evacuated from the object 2 to be inspected. Two temperature sensors may be independently used for the press and exhaust passages. The object 2 to be inspected without leakage is used, specific leakage inspection is made, and pressure and temperature are measured, thus obtaining a temperature correction coefficient used for calculating a drift correction value.
|
