发明名称 Apparatus for contactless capturing and handling of spherical-shaped objects
摘要 Apparatus and method for contactless capturing and transporting a restrained spherical-shaped semiconductor integrated circuit located within a transport tube or other component of a spherical-shaped semiconductor integrated circuit manufacturing system and restrained by a fluid flow within the transport tube or other component of the spherical-shaped semiconductor integrated circuit manufacturing system. The apparatus includes a diverging nozzle having an inlet aperture, an outlet aperture formed on an exterior side surface thereof and an interior sidewall which defines a generally frusto-conical shaped interior passageway through which gas flows. By repositioning the apparatus from a first position to a second position above, below or to one side of the first position, the restrained spherical object may be captured at an equilibrium position relative to the diverging nozzle. At the equilibrium position, the atmospheric pressure exerted on a first portion of the generally spherical object located outside the diverging nozzle is equal to an opposing pressure exerted on a second portion of the generally spherical object located within the generally frusto-conical interior passageway of the diverging nozzle by the flow of gas therethrough. Once the generally spherical object has been captured, the apparatus may be relocated to transport the device and the generally spherical object to a destination. During the transportation process, the generally spherical object will remain in the equilibrium position. The captured generally spherical object may then be released by increasing the rate of the flow of gas through the diverging nozzle until the generally spherical object is driven from the equilibrium position.
申请公布号 US6048011(A) 申请公布日期 2000.04.11
申请号 US19980162616 申请日期 1998.09.29
申请人 BALL SEMICONDUCTOR, INC. 发明人 FRUHLING, DIRK;KANATAKE, TAKASHI;CHEN, BEI
分类号 H01L21/683;(IPC1-7):B25J15/06 主分类号 H01L21/683
代理机构 代理人
主权项
地址