发明名称 |
SOG coater nozzle pot |
摘要 |
A SOG coater nozzle pot includes a pot for containing fluid and letting the fluid in the pot flow out, a funneled nozzle including a wider opening for receiving fluid from the pot and a narrower opening on a protuberance inserted into a duct, and a mounting device for mounting the funneled nozzle on the SOG coater. The nozzle pot according to the invention makes the mounting/dismounting operations of the pot more convenient and less time-consuming. The stability of the SOG coater is maintained as well.
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申请公布号 |
US6048399(A) |
申请公布日期 |
2000.04.11 |
申请号 |
US19980082949 |
申请日期 |
1998.05.21 |
申请人 |
UNITED MICROELECTRONICS CORP. |
发明人 |
TAN, EN-TIEN;YANG, MING-CHE;HUANG, KUO-FENG;CHENG, CHING-CHIH |
分类号 |
B05C5/00;B05C11/08;B05C11/10;H01L21/00;H01L21/31;(IPC1-7):B05C11/02;B05D3/12 |
主分类号 |
B05C5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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