发明名称 LASER IRRADIATING DEVICE AND EXPOSURE DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a laser irradiating device which can reduce ununiformity in intensity disrtribution because of interference fringes. SOLUTION: The laser irradiating device is provided with an optical resonator 4 in which a high reflection mirror 2 and an output mirror 3 are arranged to face each other at a prescribed interval, a solid laser rod 5 provided in the optical resonator, an excitation lamp 6 exciting the solid laser rod and an etalon 8 which is provided in the optical resonator and oscillates laser rays outputted from the output mirror in a single vertical mode by exciting of a laser medium. Further the laser irradiating device is provided with a controller 11 for controlling the etalon so that wavelength selected by the etalon continuously changes and a optically uniformizing means 14 for uniformizing the intensity distribution of the laser beams output from the output mirror.
申请公布号 JP2000105464(A) 申请公布日期 2000.04.11
申请号 JP19980275360 申请日期 1998.09.29
申请人 TOSHIBA CORP 发明人 TAKADA ATSUSHI
分类号 H01S3/105;G02B5/28;G03F7/20;(IPC1-7):G03F7/20 主分类号 H01S3/105
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