发明名称 Electron emitters and method for forming them
摘要 Electron emitters and a method of fabricating emitters which have a concentration gradient of impurities, such that the highest concentration of impurities is at the apex of the emitters, and decreases toward the base of the emitters. The method comprises the steps of doping, patterning, etching, and oxidizing the substrate, thereby forming the emitters having impurity gradients.
申请公布号 US6049089(A) 申请公布日期 2000.04.11
申请号 US19980161338 申请日期 1998.09.25
申请人 MICRON TECHNOLOGY, INC. 发明人 CATHEY, DAVID A.
分类号 H01J1/304;H01J9/02;(IPC1-7):H01J9/04 主分类号 H01J1/304
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