Piezoelectric/electrostrictive film element having convex diaphragm portions and method of producing the same

摘要

A piezoelectric/electrostrictive film element which includes a ceramic substrate having at least one window and a diaphragm portion for closing each window, and a film-like piezoelectric/electrostrictive unit formed on the diaphragm portion. The diaphragm portion has a convex shape and protrudes outwards, in a direction away from the corresponding window. The piezoelectric/electrostrictive unit includes a lower electrode, a piezoelectric/electrostrictive layer and an upper electrode, which are formed in lamination in the order of description on a convex outer surface of the diaphragm portion by a film-forming method. Also disclosed is a method of producing the piezoelectric/electrostrictive film element as described above.