THIN FILM MAGNETIC HEAD AND ITS PRODUCTION

摘要

PROBLEM TO BE SOLVED: To produce a thin film magnetic head capable of ensuring insulation between thin film coil layers even if the distance between the layers is reduced and capable of shortening a magnetic path formed by lower and upper magnetic cores. SOLUTION: In the thin film magnetic head, an insulating resin layer 21 formed on a nonmagnetic thin film 18 has projections 211 on the top. The thin film conductors of a thin film coil 25 which constitutes the lowest layer of a multilayered thin film coil consisting of thin film conductors whose cross section is substantially rectangular are disposed on the projections 211. The thin film conductors of a thin film coil 26 which constitutes the 2nd lowest layer have downwardly convex bottoms and are disposed above the thin film coil 25 and between the adjacent thin film conductors of the thin film coil 25. When the base conductor film 251 of the thin film coil 25 is removed by ion milling, overmilling is carried out to form the projections 211 of the insulating resin layer 21 as well as to ensure the magnetic gap length of the nonmagnetic alumina thin film 18.