| 摘要 |
PROBLEM TO BE SOLVED: To enhance measurement accuracy of the shape of a lead groove by processing a data outputted from a read probe, a bottom face probe, a side face probe and a position detector in a measuring circuit and correcting a lead shape data. SOLUTION: A lead probe 1 detects the axial position of a fixed cylinder 10 of a lead groove 10A, a bottom face probe 2 detects the axial position of the fixed cylinder 10, and a side face probe 3 detects the central position in the radial direction of the fixed cylinder 10. A position detector 12 detects the rotational position of a rotary stage 9. An output data is processed in a measuring circuit 4 to operate the tilt angle of the fixed cylinder 10 with respect to the rotary shaft of the rotary stage 9, the distance between detecting positions of the bottom face probe 2 and the lead probe 1, and the shift of the fixed cylinder 10 in the direction perpendicular to the rotary shaft of the rotary stage 9. Furthermore, a lead shape data determined from the measurements of the lead probe 1 is subjected to error correcting operation thus determining the shape of the lead groove 10A.
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