发明名称 |
Miniature micromachined quadrupole mass spectrometer array and method of making the same |
摘要 |
The present invention provides a quadrupole mass spectrometer and an ion filter, or pole array, for use in the quadrupole mass spectrometer. The ion filter includes a thin patterned layer including a two-dimensional array of poles forming one or more quadrupoles. The patterned layer design permits the use of very short poles and with a very dense spacing of the poles, so that the ion filter may be made very small. Also provided is a method for making the ion filter and the quadrupole mass spectrometer. The method involves forming the patterned layer of the ion filter in such a way that as the poles of the patterned layer are formed, they have the relative positioning and alignment for use in a final quadrupole mass spectrometer device.
|
申请公布号 |
US6049052(A) |
申请公布日期 |
2000.04.11 |
申请号 |
US19990305807 |
申请日期 |
1999.04.28 |
申请人 |
CALIFORNIA INSTITUTE OF TECHNOLOGY |
发明人 |
CHUTJIAN, ARA;FUERSTENAU, STEPHEN D.;ORIENT, OTTO J.;YEE, KARL Y.;RICE, JOHN T. |
分类号 |
H01J49/42;(IPC1-7):H01J49/42 |
主分类号 |
H01J49/42 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|