FERROELECTRIC THIN FILM AND ITS MANUFACTURE

摘要

PROBLEM TO BE SOLVED: To provide a single crystal ferroelectric thin film having a stably controlled composition and fine and good surfacing and crystallizing characteristics. SOLUTION: This thin film contains an Li element and at least one element of Nb and Ta. It is manufactured by the steps of adding a water in an amount, such that the mole ratio of composite metal alkoxide to water is 1:1 to 1:2, to organic solvent of composite metal alkoxide with organic ligands shown in the formula: R1OR2O-(where R1 is an aliphatic hydrocarbon group and R2 is a bivalent aliphatic hydrocarbon group which may have an ether linkage) for partial hydrolysis, of applying a precursor solution obtained in the hydrolysis onto a single crystal substrate, and of giving heat treatment thereto.