STAGE DEVICE, ALIGNER, MANUFACTURE OF THE DEVICE, AND METHOD FOR DRIVING STAGE

摘要

PROBLEM TO BE SOLVED: To provide a quick positioning device of high accuracy. SOLUTION: This stage device comprises a stage 101, which moves in a specified direction, a first unit which applies the stage 101 with a force in a specified direction, a movement device for moving the first unit or a structure body equipped with the first unit, a first measurement device for measuring the position or the movement amount of the stage 101, and a second measuring device for measuring the position or the movement amount of the first unit or the structure body. The stage 101 is controlled, based on the measured value of the first measuring device while the movement device is controlled, based on the measured value of the second measurement device.