Laser processing method, an ink jet recording head, and a system for manufacturing ink jet recording heads

摘要

A laser processing method comprises at least one of a laser light source, a beam shaping optical system for shaping laser beams, a mask having specific patterns corresponding to the processing configuration of a work, an illumination optical system for illuminating the mask, and a projection optical system for focusing the pattern images of the mask on the processing surface of the work by a specific magnification. This mask is provided with an extinct portion smaller than the quotient of the resolution and specific magnification of the projection optical system. With the method thus arranged, a work can be processed to provide complicated three-dimensional grooves having irregularities in the direction of laser irradiation by one-time processing. Also, the extinct portions make it possible to easily and finely adjust the extinction so that the precision of work processing is enhanced.