发明名称 |
PRODUCTION OF THIN FILM MAGNETIC HEAD |
摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing a thin film magnetic head by which the track width of a writing pole can be set at a high precision minute value exceeding the limit of photolithography. SOLUTION: A writing pole part is composed of a 1st pole part 210 and a 2nd pole part 220 placed opposite to each other with a gap film 24 interposed between them. The 2nd pole part 220 having a track width W20 is formed by a patterning process of photolithography. Both side faces of the 2nd pole part 220 are then subjected to ion milling to obtain a track width W21 smaller than the track width W20 by photolithography. |
申请公布号 |
JP2000105906(A) |
申请公布日期 |
2000.04.11 |
申请号 |
JP19980276246 |
申请日期 |
1998.09.29 |
申请人 |
TDK CORP |
发明人 |
TERUNUMA KOICHI;MINO TETSUYA;KANAKUBO KATSUYA;MATSUDA OSAMU |
分类号 |
G11B5/31;G11B5/39;(IPC1-7):G11B5/31 |
主分类号 |
G11B5/31 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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