发明名称 PRODUCTION OF THIN FILM MAGNETIC HEAD
摘要 PROBLEM TO BE SOLVED: To provide a method for producing a thin film magnetic head by which the track width of a writing pole can be set at a high precision minute value exceeding the limit of photolithography. SOLUTION: A writing pole part is composed of a 1st pole part 210 and a 2nd pole part 220 placed opposite to each other with a gap film 24 interposed between them. The 2nd pole part 220 having a track width W20 is formed by a patterning process of photolithography. Both side faces of the 2nd pole part 220 are then subjected to ion milling to obtain a track width W21 smaller than the track width W20 by photolithography.
申请公布号 JP2000105906(A) 申请公布日期 2000.04.11
申请号 JP19980276246 申请日期 1998.09.29
申请人 TDK CORP 发明人 TERUNUMA KOICHI;MINO TETSUYA;KANAKUBO KATSUYA;MATSUDA OSAMU
分类号 G11B5/31;G11B5/39;(IPC1-7):G11B5/31 主分类号 G11B5/31
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