| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for measuring the bore diameter or the slit width by picking up the image of a hole or a slit with a transmission film. SOLUTION: A metal plate 1 is provided with a plurality of holes or slits and covered, on one side thereof, with a transmission film 2. It is irradiated with light from one side and transmitted light is magnified through a microscope 6 and then the bore diameter or slit width is measured based on an image picked up by means of a TV camera 7. In such a method, diffused light is employed for illumination 9. Diffused light is preferably irradiated from an illumination area larger than the view field area of the microscope by a factor of 2000 or more at a distance of 0.5-2 mm from one side of the metal plate 1.
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