| 摘要 |
PROBLEM TO BE SOLVED: To easily grasp as numerical value data a changing degree of a liquid such as an etching liquid of which change with the lapse of time is obserbed as change of an optical characteristic, so as to carry out wasteless operation. SOLUTION: This device is provided in a liquid storing member 21 with a transducer 40 utilizing surface plasmon resonance, and a thermocouple 50, a resonance angle of an etching solution 30 (the minimum point of resonance angle) is computed by a computing means CPU, based on information from the transducer 40, temperature compensation is conducted, and a degree of deterioration (change with the lapse of time) of the etching solution 30 is estimated thereby. A means for removing bubbles in the vicinity of a metal thin film of the transducer 40 is prefereably provided.
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