发明名称 MANUFACTURE OF MULTIPLE LIGHT SOURCE FORMATION REFLECTION MIRROR AND OPTICAL DEVICE USING THE REFLECTION MIRROR
摘要 PROBLEM TO BE SOLVED: To accurately assemble a basic reflection mirror at a low cost by forming a reference surface on a base plate material on which the basic reflection mirror is assembled and joining a reference surface formed on the rear side of each basic reflection mirror and the reference surface formed on the base plate material so as to assemble the basic reflection mirror. SOLUTION: On the rear side of the formed basic reflection mirror 200, the reference surfaces x1 and y1 for positioning in a horizontal direction and the reference surface z1 for positioning in the height direction are formed. A block 203 equipped with reference surfaces x2, y2 and z2 corresponding to the surfaces x1, y1 and z1 is installed on the base plate 202 as a base on which the mirror 200 is assembled. And, by combining many mirrors so that the reference surfaces x1, y1 and z1 installed on an elementary optical element may tightly stick to the reference surfaces x2, y2 and z2 of the block 203 to which the elementary optical element is assembled, the combination of regularly and accurately positioned basic reflection mirrors 200 is obtained.
申请公布号 JP2000098114(A) 申请公布日期 2000.04.07
申请号 JP19980268756 申请日期 1998.09.22
申请人 NIKON CORP 发明人 KOBAYASHI TERUNORI;SHIBATA NORIO;SHINADA KUNINORI;TAKINO HIDEO
分类号 B24B13/00;G02B5/10;G02B17/00;G03F7/20;H01L21/027;(IPC1-7):G02B5/10 主分类号 B24B13/00
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