| 摘要 |
PROBLEM TO BE SOLVED: To precisely detect a very small amount of liquid leakage by utilizing the fact that propagated light is absorbed in a liquid to be attenuated. SOLUTION: This liquid sensor device for detecting leakage of a liquid from a specimem, is provided with a light wave guide path, a light emitting part 32 for making light incident into the guide path, a light receiving part 33 for detecting a light quantity after the incident light passes through the guide path to detect leakage of the liquid based on the detected light quantity, and a wave length selecting part 36 provided in a front side of the light receiving part 33 in a light path direction of the light to select a component having a specific wave lengthλcontained in the light. The specific wave lengthλselected in the selecting part 36 is overlapped with a wave length band where the liquid has high light absorbance. |
