发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device having a structure suited for flattening a wiring layer, using a spin coated film and provide its manufacturing method. SOLUTION: An insulating film is formed on a surface of a silicon substrate included in a semiconductor device, and a plurality of wirings 3 are formed at specified intervals on the insulating film. A plurality of pseudo-wirings 4, at least one of which having at least a bending part (K), are formed on the insulating film in a wide region (R) which is not covered wiring 3. In this case the pseudo-wirings 4 are formed, at the same time as the formation of the wirings 3, using the same material as the wiring 3. In addition, the pseudo- wirings 4 are formed in an irregular pattern, so that a groove 9 between the pseudo-wirings 4 will go though in one direction.
申请公布号 JP2000100820(A) 申请公布日期 2000.04.07
申请号 JP19980271971 申请日期 1998.09.25
申请人 SANYO ELECTRIC CO LTD 发明人 JITSUZAWA YOSHISUE;INOUE YASUNORI
分类号 H01L23/52;H01L21/3205;H01L21/768;(IPC1-7):H01L21/320 主分类号 H01L23/52
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