| 摘要 |
PROBLEM TO BE SOLVED: To prevent the occurrence of defects in samples at the time of separating the samples. SOLUTION: A laminated substrate 101 is held between substrate holding sections 102 and 103 in such a way that the sections 102 and 103 press the substrate 101 against each other from both sides. While the substrate 101 is rotated, the substrate 101 is separated into single substrates from a porous layer 101b by a jet by spraying the jet from a nozzle 136. In the first stage of separation, the substrate 101 is pressed with a spring 117. As the separation progresses, the already separated parts of the substrate warp due to the pressure of the jet constituting medium (water) injected into the substrate 101. When the warping amounts become larger, the substrate holding section 103 retreats and a transmitting plate 120 comes into contact with springs 118 and 119. When the plate 120 comes into contact with the springs 118 and 119, the second stage of separation starts. In the second stage, the substrate 101 is pressed by the springs 117-119. In the second stage, therefore, the laminated substrate 101 is pressed with strong pressing forces.
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