| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for an electro-optical device capable of certainly connecting light shielding film and constant potential wiring. SOLUTION: This prepn. method consists of a step forming first insulation film 12 placed between light shielding film 11a and a layer composing of constant potential wiring 80, a step forming second insulation film 4 placed between the first insulation film 12 and the constant potential wiring 80, a step annealing the first and the second insulation films 12, 4, and a step forming a contact hole 81 passing through the annealed first and second insulation films 12, 4. Where an annealing temp. in the annealing step of the first and the second insulation films 12, 4 is specified at temp. higher than or equal to a film forming temp. of the second insulation film 4.
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