PRESSURE SENSOR AND PRESSURE MEASUREMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To obtain a thin type of pressure sensor and a pressure measurement device thereof by employing a thin-thickness like member which is elastic- deformed when applying pressure and can be reset to former condition being not deformed when applying no pressure. SOLUTION: This pressure sensor 1 is provided with a pair of flat electrodes 3a arranged facing with each other and a thin flat member 5 which is elastically deformed when a pressure is applied in a direction that the electrodes 3 are opposed and can be reset to a former condition being not deformed when applying no pressure. The thin flat member 5 is made of polyimide paper. The polyimide paper is linear in elastic deformation to pressure in the thickness direction and surely returned to the former condition when applying no pressure. Accordingly, the pressure sensor 1 can output a linear sensor signal to pressure applied based upon a change of capacitance value between a pair of electrodes 3a with no hysteresis error. Also, the sensor 1 can be used under a high temperature environment because the polyimide paper normally functions under a temperature condition reaching approximately 200 deg.C.