| 摘要 |
PROBLEM TO BE SOLVED: To obtain a part member which is composed for SiO2-based material, has superior corrosion resistance with respect to plasma, and restrains the generation of contamination and particles. SOLUTION: SiO2 powder of which the purity is at least 99.9%, the content of hydroxyl group is at most 20 ppm, and the average grain diameter is at most 5μm is molded into a specified shape. This molded object is baked at 1,300-1,600 deg.C in a vacuum or a non-oxidizing atmosphere, thereby obtaining a part member for plasma treatment equipment of which member is composed of SiO2 sintered body having a surface which is exposed to at least plasma. For the surface, the content of hydroxyl group is at most 5 ppm, the total amount of metal element except Si is at most 200 ppm, and the density is at least 2.1 g/cm3.
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