| 摘要 |
PROBLEM TO BE SOLVED: To provide excellent imaging performance with about six reflection surfaces while minimizing the diameter of reflection mirror. SOLUTION: Related to a reflection/reduction imaging optical system 100 which, comprising a first reflection optical system 10 for imaging the object on a first surface R onto a second surface and a second reflection optical system 20 for imaging the image on the second surface onto a third surface W, forms a reduced image of the object of the first surface R onto the third surface W, the first reflection optical system 10 comprises a first mirror pair comprising two reflection mirrors M1 and M2, the second reflection optical system 20 comprises a second mirror comprising two reflection mirrors M3 and M4 and a third mirror pair comprising to reflection mirrors M5 and M6, and the light from the first surface R forms an intermediate image on the second surface by way of the first mirror pair, while the light from the intermediate image is guided to the third surface W by way of the second and third mirror pairs, in this order.
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