发明名称 REFLECTING REDUCTION PROJECTION OPTICAL SYSTEM, PROJECTION ALIGNER EQUIPPED THEREWITH AND EXPOSING METHOD USING THE SAME
摘要 PROBLEM TO BE SOLVED: To obtain excellent image-forming performance while the number of reflection surfaces is restrained to be comparatively small and further to improve the image- forming performance of an actually produced optical system while securing substantial telecentricity on an object side by constituting the system so that a specified condition may be satisfied. SOLUTION: This optical system is constituted of a 1st reflection mirror (concave mirror) M1 having a concave reflection surface, a 2nd reflection mirror (plane mirror having an aspherical surface) M2 having an aspherical reflection surface whose power is zero in a paraxial area, a 3rd reflection mirror (convex mirror) M3 having a convex reflection surface, an aperture diaphragm AS having a specified shape aperture part, and a 4th reflection mirror (concave mirror) M4 having the concave reflection surface in order to form the image of an object on a 1st surface R on a 2nd surface W. Then, it is constituted to satisfy the condition 0.7>s/D>0.1. In the expression, (s) shows a distance along an optical axis from the apex of the mirror M3 to the aperture diaphragm AS and D shows the distance along the optical axis from the mirror M3 to the mirror M4.
申请公布号 JP2000098229(A) 申请公布日期 2000.04.07
申请号 JP19980267707 申请日期 1998.09.22
申请人 NIKON CORP 发明人 TAKAHASHI YUTO
分类号 H01L21/027;G02B17/00;G03F7/20;(IPC1-7):G02B17/00 主分类号 H01L21/027
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