| 摘要 |
PROBLEM TO BE SOLVED: To produce a ceramic multilayer substrate having a fine conductor pattern improved in working and high frequency characteristics. SOLUTION: The conductor pattern is formed on a silicon coat PET film by screen process printing of photosensitive conductor paste, and next, after the conductor pattern is transferred on a ceramic green sheet 3a, a terminal edge part 1b of the conductor pattern is removed based on photolithography. Further, the ceramic green sheet filling a gap between conductor patterns 1c with ceramic materials is laminated, burning is performed to this, and the ceramic multilayer substrate is produced. |
