| 摘要 |
PROBLEM TO BE SOLVED: To avoid the effects of intensity irregularity of the noise and illumination of an optical system. SOLUTION: A device for detecting mark locations includes a light source 1 to generate coherent luminous flux, a half mirror 3 to divide the coherent luminous flux into reference luminous flux and luminous flux for measurement and to synchronize the return light of the above-mentioned reference luminous flux and the return light of the above-mentioned luminous flux for measurement, an objective lens 4 to guide the above-mentioned luminous flux for measurement to a mark 6 for location detection formed on a substrate 5, a Z-stage 13 on which the substrate 5 is placed, a Z-state control device 17 connected to the Z-stage 13, a CCD camera 11 to pick up the image of the luminous flux synthesized by the half mirror 3, and a computing means 12 for computing an interference image obtained by the CCD camera 11. |
