| 摘要 |
PROBLEM TO BE SOLVED: To prevent a particle from being generated from a coat by suppressing rising of a removal-end part of the coat. SOLUTION: A coat on an edge part surface among that of lead zirconate titanate formed on the surface of a substrate W is applied with a treatment liquid to remove it. Here, a treatment liquid comprising an NMP(N-methyl-2- pyrolidone) is supplied from a coat removing mechanism 5. Thus, the penetrability of the treatment liquid to the coat is weakened to an appropriate level, so that rising of the coat at a removal-end part is suppressed, thereby preventing generation of a particle from the coat. |
