| 摘要 |
PROBLEM TO BE SOLVED: To easily measure a spring constant of a minute plane spring-shaped member having a probe such as a cantilever or the like, by detecting displacement of the plate spring-shaped member having to probe brought into contact with a standard sample having a known spring constant, after moving the member in the vertical direction relative to the standard sample surface. SOLUTION: Alignment between a cantilever 1 and a standard sample 14 is carried out, so that the XY position of a probe 1a placed on the head of the cantilever 1 is positioned near the center of a self-standing membrane 21a of the standard sample 14 having a known spring constant. Thereafter, the standard sample 14 is moved in the Z-direction by a driving device 15, such as a piezoelectric actuator or the like, and the displacement caused by deflection of a plate spring-shaped member 1b is detected by a laser beam source 12 and PSD 13 by using an optical lever method. A data processing device 17 measures a resultant spring constant by the standard sample 14 and the plate spring-shaped member 1b from the detected displacement change, and calculates the spring constant of the plate spring-shaped member 1b from the obtained spring constant and the spring constant of the standard sample 14, and outputs the result. A display device 18 displays the output data.
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