| 摘要 |
PROBLEM TO BE SOLVED: To effectively remove the trend component of a contour measuring instrument from a measurement data curve without increasing the load by dividing measurement data into an arbitrary number of segments and respectively assigning specific geometric shapes to the segments, and then, removing the components of the assigned geometric shapes. SOLUTION: A shape measuring machine 1 has a table 11 for placing a work 2. A column 12 is fixed to the table 11 and a slider 13 is attached to the column 12 in a vertically movable state. The surface height X of the lens of the work 2 at each position is found by making a stylus 15 to trace the lens in the horizontal direction H by driving a stylus arm 14 in the direction H. The measuring machine 1 is actuated to sample measurement data and the data are divided into a plurality of segments at regular intervals H in the direction H. Then a straight line is assigned to each segment and the values of the straight lines are subtracted from the measurement data by executing trend correction. Consequently, trend components can be removed and data analysis, such as the spectrum analysis, correlation analysis, etc., can be performed.
|
