| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a field emission type cold cathode that can reduce in operation voltage by restraining degradation of breakdown strength between a gate electrode and an emitter and occurrence of discharge breakdown and by shortening distance between the gate electrode and the emitter. SOLUTION: This cold cathode is a board 1, that has an emitter 10a emitting electrons formed on the upper surface and is used as an emitter leading electrode, and a gate electrode 7 that is formed on the board 1 via insulating films 3, 6 and has an opening, through which the emitter 10a is surrounded spaced from it. A space for separating the gate electrode 7 from the emitter electrode 10a is near the emitter, a boundary 3a abutting to a space for an insulating film 3 and the board 1 is at a position lower than the surface of the board 1 on which the emitter 10a is formed, and a trench 4 is formed in the board 1 from a position that surrounds the emitter 10a, away from the emitter 10a farther than the boundary 3a.</p> |
